Energy Dispersive Spectroscopy (EDS)
Energy Dispersive X-ray Spectroscopy (EDS) is an analytical technique that can be coupled with several electron-beam based techniques including Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM) and Scanning Transmission Electron Microscopy (STEM).
EDS, when combined with these imaging tools, can provide spatially resolved elemental analysis from areas as small as few nanometers in diameter. The impact of the electron beam on the sample produces x-rays that are characteristic of the elements present on the sample. EDS analysis can be used to determine the elemental composition of individual points or to map out the lateral distribution of elements from the imaged area.