Depth Profiling

Depth profiles are plots that show concentration (y-axis) with respect to depth (x-axis). They can be obtained by continuously monitoring specific species of interest with respect to depth (e.g. SIMS), or in a stepwise manner by removing material, measuring, and then repeating the process (e.g. XPS or Auger). The thickness of the layers of interest and the detection limits required are important factors in choosing the best technique for a given sample.

If not done properly, artifacts and errors can be introduced into depth profiles due to the complexity of the measurement. Evans Analytical Group® (EAG) has a thorough understanding of how to acquire depth profiles under optimized conditions without introducing needless artifacts, based on many years of prior experience across many sample types.

Primary Techniques

Secondary Techniques


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