Energy Dispersive X-Ray Spectroscopy, EDS Analysis

Energy Dispersive X-ray Spectroscopy (EDS) is an analytical capability that can be coupled with several applications including Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM) and Scanning Transmission Electron Microscopy (STEM).
Energy Dispersive x-Ray Spectroscopy
EDS, when combined with these imaging tools, can provide elemental analysis on areas as small as nanometers in diameter. The impact of the electron beam on the sample produces x-rays that are characteristic of the elements present on the sample. EDS Analysis can be used to determine the elemental composition of individual points or to map out the lateral distribution of elements from the imaged area.
EDS Analysis by EAG

 

 

 

 

 


 

 

Please click here to learn about EAG's EMview software for SEM, FIB, TEM, and STEM data processing and display.

  • Imaging and elemental composition of small areas
  • Identification/mapping of elements present in defects

Signal Detected: Characteristic X-rays

Elements Detected: B-U

Detection Limits: 0.1-1at%

Depth Resolution: 0.5-3μm

Imaging/Mapping: Yes

Lateral Resolution/Probe Size: >=0.3μm

  • Quick, "first look" compositional analysis
  • Versatile, inexpensive, and widely available
  • Quantitative for some samples (flat, polished, homogeneous)
  • Semi-quantification for samples that are not flat, polished, and homogeneous
  • Size restrictions on samples
  • Samples must be vacuum compatible (not ideal for wet organic material)
  • Analysis (and coating) may spoil subsequent surface analysis
  • Limited sensitivity for low-Z elements
  • Aerospace
  • Automotive
  • Biomedical/biotechnology
  • Compound Semiconductor
  • Data Storage
  • Defense
  • Displays
  • Electronics
  • Industrial Products
  • Lighting
  • Pharmaceutical
  • Photonics
  • Polymer
  • Semiconductor
  • Solar Photovoltaics
  • Telecommunications
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