Fourier Transform Infrared Spectroscopy, FTIR Analysis

In Fourier Transform Infrared Spectroscopy (FTIR) analysis, a spectrum showing molecular vibrations is obtained, in order to identify or characterize organic materials such as polymers, lubricants, adhesives and cleaning agents. A limited number of inorganic compounds can also be evaluated using FTIR analysis. For semiconductors, FTIR is used to make quantitative measurements of hydrogen bonds in silicon nitride filmsFourier Transform Infrared Spectroscopyand to measure the interstitial oxygen content in bulk silicon.

At Evans Analytical Group® (EAG), most FTIR analyses are carried out with a microscope FTIR. Micro-FTIR, with a minimum spot size of 15µm, is ideal for the direct, in situ, analysis of organic contaminants on metallic surface such as bond pads or contacts. For the identification of contaminants on non-metallic surfaces such as on a lens or other optical component, or for the analysis of bulk organic materials, specialized sample preparation methods are utilized at EAG.

EAG's analytical scientists are highly experienced and are knowledgeable in the application of FTIR analyses to a wide variety of problems pertaining to organic materials or organic contaminants. Experience, fast turnaround, clear concise written reports, and person to person service are provided to help customers resolve their materials problems.


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  • Identifying organic contaminants (e.g. particles, residues)
  • Characterization or identification of organic materials (e.g. solids, powders, films, or liquids)
  • Quantification of O and H in Si, and H in SiN wafers (Si-H vs. N-H)

Signal Detected: Infrared absorption

Elements Detected: Molecular groups

Detection Limits: 0.1-1wt%

Depth Resolution: 0.1-2.5µm

Imaging/Mapping: No

Lateral Resolution/Probe Size: >=15µm

  • Capable of identifying organic functional groups and often specific organic compounds
  • Extensive spectral libraries for compound identification
  • Ambient conditions (not vacuum; good for volatile compounds)
  • Typically non-destructive
  • Minimum analysis area: ~15µm
  • Limited surface sensitivity (typical sampling volumes are ~0.8µm)
  • Minimum analysis area: ~15µm
  • Limited inorganic information
  • Typically not quantitative (needs standards)
  • Aerospace
  • Automotive
  • Biomedical/biotechnology
  • Compound Semiconductor
  • Data Storage
  • Defense
  • Displays
  • Electronics
  • Industrial Products
  • Lighting
  • Pharmaceutical
  • Photonics
  • Polymer
  • Semiconductor
  • Solar Photovoltaics
  • Telecommunications
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