Morphology & Topography

Morphology is a qualitative evaluation of the three dimensional shape of a surface, whereas topography provides quantitative feature dimensions. The choice of analytical technique depends on whether qualitative and/or quantitative information is required.

Morphology

Morphology, or "what a sample looks like," is best evaluated using imaging techniques, such as optical microscopy or Scanning Electron Microscopy (SEM). These methods can also provide layer thickness and other quantitative information.

Topography

Determination of roughness, step heights and feature size can be address using Atomic Force Microscopy (AFM), Stylus Profilometry or Optical Profilometry.

 

 

 

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