RBS

Nuclear Reaction Analysis (NRA)

Nuclear Reaction Analysis (NRA) is used to measure low-Z elements (e.g carbon, nitrogen, oxygen, and boron) in thin films. During NRA analysis, the primary projectile induces a nuclear reaction with the low-Z nuclei in the thin film and ejects particles with kinetic energies characteristic of specific nuclear reactions (i.e. particular elements).

NRA services

Nuclear Reaction Analysis (NRA) - Evans Analytical Group



Very few labs can offer NRA commercially, or match Evan Analytical Group®'s (EAG) depth and breadth of experience, which enables fast turnaround time, accurate data, and person-to-person service.

NRA can be used to quantitatively measure the total concentration of B, C, N, and O present in a film. These elements can be measured at a much lower concentration using NRA compared to RBS. By performing NRA in combination with RBS, the concentrations of light elements in thin films can be determined.

  • Measuring low levels of B, C, N, and O in thin films

Elements Detected: C, N, O, B

Detection Limits: 0.5-1at%

Depth Resolution: None

Imaging/Mapping: No

Lateral Resolution/Probe Size: >=1mm

  • Non-destructive compositional analysis
  • Quantitative without standards
  • Whole wafer analysis (up to to 300mm) as well as irregular and large samples
  • Conductor and insulator analysis
  • Low-Z element sensitivity
  • Large analysis area (1mm)
  • No depth resolution
  • Each element requires a specific projectile, so multiple measurements maybe necessary depending on the elements involved
  • Aerospace
  • Defense
  • Semiconductor
  • Telecommunications
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