Optical profilometry (OP) is a non-contact interferometric-based method for characterizing surface topography. A typical OP analysis provides 2D and 3D images of a surface, numerous roughness statistics, and feature dimensions. In addition to these standard measurements, EAG can also perform many advanced OP analyses with a state-of-the-art Bruker Contour GTX-8 3D optical microscope. These include:
- Analysis automation for high-throughput measurements of several hundred features on a single sample, such as patterned wafers or die features
- Thickness determination of transparent, continuous films.
OP is suitable for numerous applications and sample types because it can accommodate many sample geometries, offering a wide range of possible analytical dimensions and a versatile Z-range, covering a broad range of potential surface roughnesses. EAG is committed to working with our clients to develop unique approaches for characterizing the topographies of even the most challenging samples.