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Residual Gas Analysis (RGA)
Internal Water Vapor Content

In order to eliminate failures in microelectronic components caused by chemical reaction (corrosion), the internal gas composition of the component must be known. MIL-STD-883, Method 1018 is generally the accepted specification for internal water vapor content. The Residual Gas Analysis (RGA) testing method defines procedures for RGA equipment calibration and device testing, as well as the maximum acceptable limits for internal water vapor content.

RGA is useful for more than moisture content analysis. EAG’s RGA testing system can detect all masses up to 140 AMU, allowing common gasses to be identified and quantified. Samples of process atmospheres and unusual sealing environments can be analyzed to detect the evolution or resorption of gasses. The system software can determine moisture content as well as an entire spectrum of gasses in the component.

In addition to providing routine RGA analysis, EAG has the technical expertise to identify the origin of the “problem” internal gasses and provide corrective action on an as-needed basis. We can provide consulting for process improvements, based on our many years of experience providing RGA testing at our Los Angeles (formerly known as SEAL Laboratories).

Ideal Uses

Packages – DIP’s, Quad Packs, TO-x Cans, Metal Lidded Devices, Filler Gas Containers and many other geometries can be analyzed.

Technical Specifications

Volumes – 0.01cc to 25cc volumes can be analyzed. Precision radiographic technique is used to determine the volume of a package

Analysis – All gases with molecular weights between 1-140 mass units can be identified with a survey scan, or up to 16 components can be preselected for quantitative analysis.

MIL-STD-883/750 Testing – Nitrogen, Oxygen, Argon, Carbon Dioxide, Moisture, Hydrogen, Helium, Fluorocarbons, Methane, and Ammonia are measured and reported.

Strengths

Analysis – All gases with molecular weights between 1-140 mass units can be identified with a survey scan, or up to 16 components can be preselected for quantitative analysis.

Limitations

Package must be hermetically sealed with cavity size not smaller than 0.01cc.