Active Layer Parametrics and EAG Laboratories Announce Agreement on Sale of First ALPro-50 Metrology Tool
Active Layer Parametrics (ALP), a Silicon Valley semiconductor metrology tool startup company, and EAG Laboratories (EAG), a global scientific services company, today announced their agreement for the purchase of ALP’s first commercial metrology tool (ALPro-50) by EAG. ALP has developed a novel technology for the comprehensive electrical characterization of electronic materials. As high tech industry progresses to more advanced applications, measuring the electrical properties of ever-thinner electronic materials employed in high-performance device structures necessitates high precision measurement for accelerated and efficient unit process development and device modeling. Unlike existing measurement techniques, the ALPro technology provides carrier concentration, mobility and resistivity depth profiles through thin semiconductor layers at angstrom-level resolution.
“We are very excited to make our first ALPro-50 tool sale to EAG who is a world leader in electronic materials characterization,” said ALP CEO Dr. Bulent Basol. “EAG’s leadership in Secondary Ion Mass Spectroscopy (SIMS) analysis of materials combined with ALP’s revolutionary toolbox will enable us to develop measurement recipes for a variety of materials employed in a wide range of devices. This toolbox will be invaluable for companies developing ultra-shallow technologies on Si, as well as for groups working on the development and qualification of materials, process recipes and tools for Ge and III-V based devices.”
“We are excited to be the first company to acquire ALP’s unique ALPro-50 tool,” said Pat Lindley, Executive Vice President of EAG. “We believe ALP’s technology has much to offer our customers in supplementing the concentration depth profiles provided by SIMS with valuable depth profiles of electrical properties.”
Active Layer Parametrics (ALP)
ALP is a Silicon Valley semiconductor metrology equipment company that has developed a unique technology for measuring depth profiles of critical electrical properties, including mobility and active carrier concentration, of semiconductor layers at angstrom-level resolution. Application areas include precise characterization of source-drain regions for MOSFETs and new material layers (SiGe, Ge, III-V) used in advanced device structures.
One of the most respected names in materials characterization for research, production and failure analysis support, EAG Laboratories is a global scientific services company operating at the intersection of science, technology and business. Through multidisciplinary expertise in the life, materials and engineering sciences, EAG Laboratories helps companies innovate and improve products, ensure quality and safety, protect intellectual property and comply with evolving global regulations. EAG Laboratories employs 1,200+ employees across 20 laboratories in seven countries, serving more than 7,000 clients worldwide.