A materials analysis study into FinFET technology advancement: 22 nm to 7 nm

INTRODUCTION

7 nm FinFET (Fin Field Emission Transistor) process technology was introduced to semiconductor manufacturing mass production in 2018, following 10 nm node in 2016, 14 nm node in 2014 and 22 nm node in 2012[1]. While the naming of process nodes is not directly related to any measurable distance on a chip, 7 nm process technology provides shrink down transistors and thus offers improvement in silicon area utilization and power efficiency. In this application note, we provide a materials analysis study into the comparison between 22 nm node and 7 nm node FinFET technologies, using TEM-based (Transmission Electron Microscopy) techniques.

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