SIMS Detection Limits of Selected Elements in ZnO Under Normal Depth Profiling Conditions

APPLICATION NOTE

SIMS ZnO - SIMS DETECTION LIMITS OF SELECTED ELEMENTS IN ZnO UNDER NORMAL DEPTH PROFILING CONDITIONS


Overlay of two separate SIMS profiles of an arsenic implant in ZnO.

Overlay of two separate SIMS profiles of an arsenic implant in ZnO. Excellent reproducibility is demonstrated in this example as well as the count-rate-limited detection limits of approximately 1e16 at/cm3.

Overlay of multiple species in a single SIMS profile for a ZnO sample containing implants of Ti, Cr, Ni and Cu.

Overlay of multiple species in a single SIMS profile for a ZnO sample containing implants of Ti, Cr, Ni and Cu.

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