X-ray Fluorescence (XRF) is a non-destructive technique that is used to quantify the elemental compositions of materials and to measure film thickness and composition. X-rays are used to excite the sample, causing the emission of X-rays with energies characteristic of the elements present.
XRF is part of the SMART chart and measures composition and impurities of bulk materials and films.
XRF is capable of detecting elements from B-U in concentrations from the ppm range to 100%. In addition, measurement of copper is possible using this technique. Because X-rays are used to excite the sample, analysis depths from less than a nanometer to several millimeters can be achieved, depending on the material. Through the use of appropriate reference standards, or fundamental parameters (FP) when standards aren’t available, XRF can accurately quantify the elemental composition of most materials.
Five XRF systems are available: four wavelength dispersive instrument (WDXRF) and an energy dispersive instrument (EDXRF), with the main difference being the way in which the X-rays are separated and measured. WDXRF has very good energy resolution, which leads to fewer spectral overlaps and improved background intensities. EDXRF has higher signal throughput, which enables small area analysis or mapping.
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