Nanoindentation uses contacts, where a probe is pushed into a solid, while the penetration depth is recorded simultaneously with near-atomic resolution. In addition, this capability can reduce the probing volume down to an order of magnitude of 100 nm3, which allows the use of continuum mechanical contact models to extract properties like hardness and modulus for thin films and constituents of microstructures. The contact geometries and testing methods are configurable so that mechanical characterization can be extended to brittle properties, adhesion, stress-strain, scratch, wear or structural stiffness of microstructures.