Above all, AES is a semi-quantitative method, meaning that we typically provide results based on standard sensitivity factors provided by the equipment manufacturer. Where more accurate results are required, these can be obtained by looking at known compositions and comparing them to the unknown material.
The electron beam can be scanned over a variably sized area, or it can be directly focused on a specific surface feature of interest. This ability to focus the electron beam to diameters of 10-20 nm makes
Auger Electron Spectroscopy an extremely useful tool for elemental analysis of small surface features. Other techniques that may also be considered are
XPS and
TXRF. When used in combination with a sputtering ion gun, Auger Electron Spectroscopy can also perform compositional depth profiling.