Cathodoluminescence (CL) is electromagnetic radiation, or light, ranging from visible (VIS) to near-infrared (NIR) created by the interaction of high-energy electrons (cathode rays) with a luminescent material. The light that is emitted carries very specific information about the optical and electronic properties of the sample.
Using a specialized Scanning Electron Microscope (SEM) that has visible light collection, corresponding sample structure (SE) and CL emission maps can be acquired simultaneously with sub-micrometer resolution. In some cases, the CL spatial resolution can be as good as 30-50 nm. CL mapping can be performed on both cross-sections (XS) or in plan-view (PV) to characterize a sample’s localized composition, doping, structure and defects, all with very high spatial resolutions.
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