Cryogenic focused ion beam and scanning electron microscopy (cryo-FIB/SEM) is a technique used to minimize ion and electron beam damage. Soft materials such as polymers and biological specimens, battery materials, and many other materials systems may deform, melt, or amorphize under room-temperature FIB milling and SEM imaging conditions. Through cryo-FIB/SEM, the sample is cooled to cryogenic (-130°C) temperatures to minimize these artifacts. The cooling is done by running liquid nitrogen through the CryoMat cold stage installed in our ThermoFisher FEI Helios G3 system. This enables accurate FIB cross-sectioning and SEM measurements of beam sensitive materials with minimal deformation. This also allows for cryogenic FIB lamella preparation for cryo-TEM analysis.