Energy Dispersive X-ray Spectroscopy (EDS)

Energy Dispersive X-ray Spectroscopy (EDS) is a chemical analysis method that can be coupled with the two major electron beam based techniques of Scanning Electron Microscopy (SEM)Transmission Electron Microscopy (TEM) and Scanning Transmission Electron Microscopy (STEM).

EDS, when combined with these imaging tools, can provide spatially resolved elemental analysis from areas as small as 1 nanometer in diameter (STEM). In SEM, the analysis volume is larger and ranges in volume from perhaps 0.1 to 3 microns. The impact of the electron beam on the sample produces x-rays that are characteristic of the elements present on the sample. EDS analysis can be used to determine the elemental composition of individual points, line scans or to map out the lateral distribution of elements from the imaged area.

Energy Dispersive X-ray Spectroscopy

Ideal Uses of EDS

  • Elemental composition of small areas using SEM/TEM imaging
  • Defect identification/mapping

Strengths

  • Quick “first look” compositional analysis
  • Versatile, inexpensive, and widely available
  • Quantitative for some samples (flat, polished, homogeneous)

Limitations

  • Generally, semi quantitative analysis is possible
  • Sample size must be compatible with SEM/TEM
  • Samples must be vacuum compatible (not ideal for wet organic materials)
  • Analysis (and coating) may restrict subsequent surface analysis
  • Numerous elemental peak overlaps are possible, careful review of the spectra is required

EDS Technical Specifications

  • Signal Detected: Characteristic X-rays
  • Elements Detected: B-U
  • Detection Limits: 0.1-1 at%
  • SEM Sampling Depth: 0.1-3 μm
  • STEM Sampling Depth:  ~0.1 microns (foil thickness)
  • Imaging/Mapping and Line Scans: Yes
  • Lateral Resolution: 1-2 nm for STEM-EDS,  ≥0.1 μm for SEM EDS

Would you like to learn more about using Energy Dispersive X-ray Spectroscopy?

Contact us today for your Energy Dispersive X-ray Spectroscopy (EDS) needs. Please complete the form below to have an EAG expert contact you.

To enable certain features and improve your experience with us, this site stores cookies on your computer. Please click Continue to provide your authorization and permanently remove this message.

To find out more, please see our privacy policy.