Aberration Corrected Scanning Transmission Electron Microscopy (AC-STEM) is now widely used in material science research, product process control, and device failure analysis for a wide variety of different materials. The aberration-corrected electron probe scanned across a thin specimen provides atomic-resolution imaging not only from transmitted electrons (TE – HAADF, BF, ABF…), but also from secondary electrons (SE) emitted from the surface of the specimen. AC-STEM SE imaging provides a unique method of characterizing material structure including important depth information.