Conventionally, dislocation evaluation of various materials has been performed by general TEM analysis using cross-sectional samples. However, in TEM observation, as shown in Fig. 1, there are many interference fringes due to thickness differences and interference fringes caused by bending, which can complicate analysis. The STEM image corresponding to Fig. 1 is shown in Fig. 2. It can be seen that the contrast of dislocations can be confirmed very simply in the STEM image comparing the two. Also, dislocation type information can be acquired at the same time.