If the charge-up correction by electron beam irradiation is insufficient, elements such as sodium (Na) move into the sample due to the electric field induced by the surface charge (electric field-induced diffusion phenomenon), and an accurate depth distribution is obtained. I can’t get it. Figure 1 shows an example of Na concentration analysis in an insulating material (BPSG).
Fig. 1 shows an example of Na depth concentration analysis in insulating material (BPSG). The Red profile is a measurement condition with appropriate charge-up correction The Blue profile is a measurement condition with insufficient charge-up correction