Standards for SIMS
EAG Laboratories can offer a range of standards for SIMS used to calibrate materials such as Si, SiO2, SiN, Wsi, TiN, TiW, Al, GaAs, InP with various elemental ions implanted into the substrate.
Si
SiO2
SiNx
WSix
TiNx
TiWx
Al
GaAs
InP
NiCr-3
Si
| Species | Nominal Energy (keV) | Nominal Dose (at/cm2) |
|---|---|---|
| 1H | 30 | 2×1015 |
| 7 Li | 50 | 1×1014 |
| 11B | 80 | 1×1014 |
| 12C | 100 | 1×1015 |
| 14N | 80 | 1×1015 |
| 18O | 100 | 1×1014 |
| 19F | 100 | 5X1014 |
| 23 Na | 150 | 1×1014 |
| 24Mg | 150 | 1×1014 |
| 27 Al | 150 | 1×1014 |
| 31P | 150 | 1×1014 |
| 34 S | 150 | 1×1014 |
| 35 Cl | 200 | 2×1014 |
| 39 K | 200 | 1×10 |
| 40Ar | 200 | 5×1015 |
| 40Ca | 200 | 1×1014 |
| 48 Ti | 150 | 5×1014 |
| 52Cr | 200 | 2×1014 |
| 54Fe | 200 | 1×1014 |
| 55Mn | 200 | 1×1014 |
| 59 Co | 200 | 1×1014 |
| 60 Ni | 200 | 2×1014 |
| 65 Cu | 200 | 1×1014 |
| 64 zn | 200 | 1×1014 |
| 69 Ga | 250 | 1×1014 |
| 70Ge | 160 | 5×1014 |
| 75 As | 80 | 1×1014 |
| 79 Br | 250 | 1×1014 |
| 98 Mo | 200 | 1×1014 |
| 106Pd | 200 | 2×1014 |
| 107 Ag | 200 | 2×1014 |
| 115In | 300 | 1×1014 |
| 120Sn | 300 | 1×1014 |
| 121Sb | 200 | 6×1014 |
| 181 Ta | 300 | 2×1014 |
| 184W | 200 | 1×1014 |
| 195Pt | 400 | 1×1014 |
| 197Au | 200 | 1×1014 |
SiO2
| Species | Nominal Energy (keV) | Nominal Dose (at/cm2) |
|---|---|---|
| 1H | 30 | 2×1015 |
| 11B | 80 | 1×1014 |
| 12C | 100 | 1×1015 |
| 14N | 100 | 1×1015 |
| 9 F | 100 | 1×1014 |
| 23 Na | 30 | 5×1013 |
| 24Mg | 150 | 2×1015 |
| 27 Al | 150 | 2×1015 |
| 31P | 150 | 2×1015 |
| 34 S | 150 | 2×1015 |
| 35 Cl | 200 | 5×1014 |
| 39 K | 100 | 1×1014 |
| 10Ar | 200 | 5X1015 |
| 40Ca | 200 | 5×1014 |
| 50 Ti | 200 | 1×1014 |
| 52Cr | 200 | 1×1014 |
| 54Fe | 150 | 1×1015 |
| 55Mn | 200 | 1×1014 |
| 59 Co | 200 | 1×1014 |
| 60 Ni | 200 | 1×1014 |
| 65 Cu | 150 | 1×1015 |
| 64 zn | 200 | 1×1014 |
| 69 Ga | 250 | 1×1014 |
| 70Ge | 160 | 5×1014 |
| 75 As | 250 | 1×1014 |
| 79 Br | 250 | 1×1014 |
| 98 Mo | 250 | 1×1014 |
| 115In | 300 | 1×1014 |
| 120Sn | 300 | 1×1014 |
| 23 Sb | 300 | 1×1014 |
| 181 Ta | 300 | 1×1014 |
| 184W | 200 | 5×1014 |
| 195Pt | 400 | 1×1014 |
| 197Au | 400 | 1×1014 |
SiNx
| Species | Nominal Energy (keV) | Nominal Dose (at/cm2) |
|---|---|---|
| 11B | 80 | 1×1014 |
| 12C | 100 | 1×1015 |
| 18O | 100 | 5×1014 |
| 19F | 100 | 1×1014 |
| 23Na | 150 | 1×1014 |
| 24Mg | 150 | 1×1014 |
| 27Al | 150 | 1×1014 |
| 31P | 150 | 1×1014 |
| 34S | 150 | 1×1014 |
| 35Cl | 150 | 5×1014 |
| 39K | 200 | 1×1014 |
| 40Ar | 200 | 5×1015 |
| 40Ca | 200 | 1×1014 |
| 50Ti | 200 | 1×1014 |
| 54Fe | 200 | 1×1014 |
| 59Co | 200 | 1×1014 |
| 60Ni | 200 | 1×1014 |
| 65Cu | 200 | 1×1014 |
| 64Zn | 200 | 1×1014 |
| 75As | 250 | 1×1014 |
| 79Br | 250 | 1×1014 |
| 98Mo | 250 | 1×1014 |
| 120Sn | 300 | 1×1014 |
| 123Sb | 300 | 1×1014 |
| 181Ta | 400 | 1×1014 |
| 184W | 400 | 1×1014 |
| 195Pt | 400 | 1×1014 |
| 197Au | 400 | 1×1014 |
SiNx Bulk Doped Reference Materials
| Species | Nominal Energy (keV) |
|---|---|
| H | 4.2 atomic % |
WSix
| Species | Nominal Energy (keV) | Nominal Dose (at/cm2) |
|---|---|---|
| 1H | 30 | 2X1015 |
| 11B | 80 | 1X1014 |
| 12C | 100 | 1X1015 |
| 14N | 100 | 1X1015 |
| 18O | 100 | 5X1014 |
| 19F | 70 | 5X1014 |
| 23 Na | 150 | 1X1014 |
| 24Mg | 150 | 1X1014 |
| 27 Al | 150 | 1X1014 |
| 31P | 150 | 1X1014 |
| 34 S | 150 | 1X1014 |
| 35 Cl | 200 | 1X1014 |
| 39 K | 200 | 1X1014 |
| 40Ar | 200 | 5X1015 |
| 40Ca | 200 | 1X1014 |
| 50 Ti | 200 | 1X1014 |
| 54Fe | 200 | 1X1014 |
| 55Mn | 200 | 1X1014 |
| 59 Co | 200 | 1X1014 |
| 60 Ni | 200 | 1X1014 |
| 65 Cu | 200 | 1X1014 |
| 64 zn | 200 | 1X1014 |
| 69 Ga | 250 | 1X1014 |
| 75 As | 250 | 1X1014 |
| 79 Br | 250 | 1X1014 |
| 98 Mo | 250 | 1X1014 |
| 115In | 300 | 1X1014 |
| 120Sn | 300 | 1X1014 |
| 123Sb | 300 | 1X1014 |
| 181 Ta | 400 | 1X1014 |
| 195Pt | 400 | 1X1014 |
| 197Au | 400 | 1X1014 |
TiNx
| Species | Nominal Energy (keV) | Nominal Dose (at/cm2) |
|---|---|---|
| 1H | 30 | 2×1015 |
| 11B | 80 | 1×1014 |
| 12C | 100 | 1×1015 |
| 18O | 100 | 5×1014 |
| 19F | 100 | 1×1014 |
| 23Na | 150 | 1×1014 |
| 24Mg | 150 | 1×1014 |
| 27Al | 150 | 1×1014 |
| 31P | 150 | 1×1014 |
| 34S | 150 | 1×1014 |
| 35Cl | 200 | 1×1014 |
| 39K | 200 | 1×1014 |
| 40Ar | 200 | 5×1015 |
| 40Ca | 200 | 1×1014 |
| 52Cr | 200 | 1×1014 |
| 54Fe | 200 | 1×1014 |
| 55Mn | 200 | 1×1014 |
| 59Co | 200 | 1×1014 |
| 60Ni | 200 | 1×1014 |
| 65Cu | 200 | 1×1014 |
| 64Zn | 200 | 1×1014 |
| Ga | 250 | 1×1014 |
| 75As | 250 | 1×1014 |
| 98Mo | 250 | 1×1014 |
| 115In | 300 | 1×1014 |
| 120Sn | 300 | 1×1014 |
| 23Sb | 300 | 1×1014 |
| 181Ta | 400 | 1×1014 |
| 184W | 400 | 1×1014 |
| 195Pt | 400 | 1×1014 |
| 197Au | 400 | 1×1014 |
TiWx
| Species | Nominal Energy (keV) | Nominal Dose (at/cm2) |
|---|---|---|
| 11B | 80 | 1×1014 |
| 12C | 100 | 1×1015 |
| 14N | 100 | 1×1015 |
| 18O | 100 | 5×1014 |
| 24Mg | 150 | 1×1014 |
| 27 Al | 150 | 1×1014 |
| 31P | 150 | 1×1014 |
| 35 Cl | 200 | 1×1014 |
| 39 K | 200 | 1×1014 |
| 40Ca | 200 | 1×1014 |
| 54Fe | 200 | 1×1014 |
| 55Mn | 200 | 1×1014 |
| 59 Co | 200 | 1×1014 |
| 60 Ni | 200 | 1×1014 |
| 65 Cu | 200 | 1×1014 |
| 69 Ga | 250 | 1×1014 |
| 75 As | 250 | 1×1014 |
| 79 Br | 250 | 1×1014 |
| 98 Mo | 250 | 1×1014 |
| 115In | 300 | 1×1014 |
| 120Sn | 300 | 1×1014 |
| 121Sb | 300 | 1×1014 |
| 181 Ta | 400 | 1×1014 |
| 195Pt | 400 | 1×1014 |
| 197Au | 400 | 1×1014 |
Al
| Species | Nominal Energy (keV) | Nominal Dose (at/cm2) |
|---|---|---|
| 11B | 80 | 1×1014 |
| 12C | 100 | 1×1015 |
| 14N | 100 | 1×1015 |
| 18O | 100 | 5×1014 |
| 19F | 100 | 1×1014 |
| 20 Na | 150 | 1×1014 |
| 24Mg | 150 | 1×1014 |
| 31P | 150 | 1×1014 |
| 34 S | 150 | 1×1014 |
| 36 Cl | 200 | 1×1014 |
| 39 K | 200 | 1×1014 |
| 40Ar | 200 | 5×1015 |
| 40Ca | 200 | 1×1014 |
| 48 Ti | 200 | 1×1014 |
| 54Fe | 200 | 1×1014 |
| 55Mn | 200 | 1×1014 |
| 59 Co | 200 | 1×1014 |
| 60 Ni | 200 | 1×1014 |
| 65 Cu | 200 | 1×1014 |
| 64 zn | 200 | 1×1014 |
| 69 Ga | 250 | 1×1014 |
| 75 As | 250 | 1×1014 |
| 79 Br | 250 | 1×1014 |
| 98 Mo | 250 | 1×1014 |
| 115In | 300 | 1×1014 |
| 120Sn | 300 | 1×1014 |
| 23 Sb | 300 | 1×1014 |
| 181 Ta | 400 | 1×1014 |
| 184W | 400 | 1×1014 |
| 195Pt | 400 | 1×1014 |
| 197Au | 400 | 1×1014 |
Al ion implant reference materials are 1.6 cm x 1.6 cm
GaAs
| Species | Nominal Energy (keV) | Nominal Dose (at/cm2) |
|---|---|---|
| 1H | 30 | 2×1015 |
| 2 H | 50 | 1×1015 |
| 9Be | 100 | 1×1014 |
| 11B | 100 | 1×1014 |
| 12C | 100 | 1×1015 |
| 14N | 100 | 1×1015 |
| 13 O | 100 | 5×1014 |
| 19F | 100 | 1×1014 |
| 20 Na | 150 | 1×1014 |
| 24Mg | 260 | 1×1014 |
| 27 Al | 260 | 1×1014 |
| 29 Si | 260 | 1×1014 |
| 34 S | 300 | 1×1014 |
| 35 Cl | 200 | 1×1014 |
| 40Ca | 200 | 1×1014 |
| 52Cr | 300 | 1×1014 |
| 55Mn | 300 | 1×1014 |
| 54Fe | 300 | 1×1014 |
| 60 Ni | 200 | 1×1014 |
| 65 Cu | 200 | 1×1014 |
| 64 zn | 300 | 1×1014 |
| 79 Br | 250 | 1×1014 |
| 80 Se | 600 | 1×1014 |
| Cd (110Cd – 116Cd) | 600 | 4×1014 |
| 115In | 600 | 1×1014 |
| 120Sn | 600 | 1×1014 |
| 130Te | 600 | 1×1014 |
| 195Pt | 400 | 1×1014 |
| 197Au | 400 | 1×1014 |
InP
| Species | Nominal Energy (keV) | Nominal Dose (at/cm2) |
|---|---|---|
| 1H | 30 | 2×1015 |
| 9Be | 100 | 1×1014 |
| 11B | 80 | 1×1014 |
| 12C | 100 | 1×1015 |
| 14N | 100 | 1×1015 |
| 18O | 100 | 5×1014 |
| 20Na | 150 | 1×1014 |
| 24Mg | 150 | 1×1014 |
| 29Si | 200 | 1×1014 |
| 34S | 150 | 1×1014 |
| 35Cl | 200 | 1×1014 |
| 39K | 200 | 1×1014 |
| 40Ca | 200 | 1×1014 |
| 52Cr | 200 | 1×1014 |
| 54Fe | 300 | 1×1014 |
| 60Ni | 200 | 1×1014 |
| 65Cu | 200 | 1×1014 |
| 64Zn | 300 | 1×1014 |
| 80Se | 250 | 1×1014 |
| 120Sn | 300 | 1×1014 |
NiCr-3
NiCr-3 is a standard sample for evaluating interface resolution by ion beam sputtering. NiCr-3 is similar to SRM-2135 by NIST. (SRM-2135 is a sample consisting of 5 layers of Cr and 4 layers of Ni.)
The total structure of NiCr-3 consists of 6 layers of Cr (53nm) and 6 layers of Ni (64nm) stacked on a Si wafer. Refer to the attached page for typical data for NiCr-3 and SRM-2135.
| ■ Sample size | 1ｘ3 cm | |||||||||||||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| ■ Deposition conditions | 1×10-4 torr Ni (purity 99.9%) and Cr (purity 99.9%) were deposited by ion sputtering deposition under Ar partial pressure. * Contains trace amounts of Al (1.3%), Fe (2.7%), and Mo (1.0%). | |||||||||||||||||||||||||||||||||||
| ■ Total film thickness | A crater with a diameter of 754 nm * 400 μm was opened by sputtering, and the crater depth was determined by measuring with a stylus step gauge (Deltak3030). | |||||||||||||||||||||||||||||||||||
| ■ Film thickness variation | About ± 2% | |||||||||||||||||||||||||||||||||||
| ■ Interface width | Determined from 10-90% of Ni distribution gradient. (Shows comparative data for NiCr-3 and SRM-2135a)
* All figures are in nm.
|
<Typical data> Analysis conditions: 3keV Ar beam, Zalaler rotating sample stage
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