Rutherford Backscattering Spectrometry (RBS) is a thin film analysis technique which is performed by bombarding a sample with a monoenergetic beam of ions with an energy of a few MeV. The resultant backscattered ions are used to determine the matrix composition and thickness of thin films and thin film structures. RBS is unique in that it is quantitatively accurate without standards, can perform nondestructive depth profiling, and can measure the hydrogen content in samples, in addition to nearly all of the elements of the periodic table.
In this webinar we will cover:
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