sMIM Webinar

Presented by EAG Laboratories and PrimeNano

Understanding the electrical properties of materials with nanoscale precision is crucial in many industrial and academic applications. In this webinar, PrimeNano Inc. in collaboration with EAG Laboratories, will be presenting information on scanning Microwave Impedance Microscopy (sMIM) operation and detailing several case studies. sMIM is a near-field Atomic Force Microscopy (AFM) based technique that provides electrical property information of materials at the nanoscale and the technique has just been launched as a service by EAG.

In sMIM, a custom AFM tip is used both as a microwave source and a reflected signal collector. The reflected signal in turn provides the local capacitive and conductivity information about the material under measurement. Since sMIM inherently measures the capacitance of the sample this makes it an excellent method for characterizing a wide range of materials such as insulators, semiconductors, 1D/2D structures, ferroelectric materials and others. In this webinar, the operation of sMIM will be described and several case studies will be presented. In the case studies presented, sMIM has been able to provide information that is difficult or impossible to collect by any other means making it an invaluable tool in investigating various semiconductor devices and emerging material systems.

In this webinar we will cover:

  • Introduction to Scanning Microwave Impedance Microscopy (sMIM)
  • PrimeNano sMIM implementation
  • Case Studies
    • Dopant concentration and type
    • FinFETs
    • Buried structures
    • Carbon nanotubes
    • Emerging new materials

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