Elemental characterization of defects and contamination on surfaces is a necessity for failure analysis. Energy Dispersive X-Ray Spectrometry (EDS), combined with Scanning Electron Microscopy (SEM) provides a rapid and efficient tool for characterizing particles and defects which are on the order of 1µm or larger. Modern instruments allow for the detection of light elements (B through F), as well as the higher Z elements, and for simultaneous imaging of multiple elements. The lateral distribution of seven elements is shown in Figure 1 along with secondary electron and back-scattered electron images. From this collection of images it is readily determined that the contamination is a conglomeration of carbon bearing material and oxides of Mg, Al and Si.