EAG’s New Nanoprobing System

We are thrilled to announce our latest nanoprobing capabilities at Eurofins EAG, powered by cutting-edge Kleindiek equipment. Nanoprobing is an advanced analytical technique that enables the direct measurement and characterization of front and backend structures.

Our new system facilitates precise measurements and failure analysis of advanced nodes, providing our customers with detailed and highly accurate information. By utilizing this technology, we ensure our customers stay ahead in semiconductor technology development, guaranteeing the reliability and performance of their products.


This system can address sub-10 nanometer structures on samples up to 20 x 20 millimeters, with a voltage range of +/- 100 V for DC measurements (+/- 50 V for current imaging). Additionally, a heating & cooling insert allows device characterization at an extended temperature range between -20ºC – +150ºC.

Nanoprobing is critical in comprehending and evaluating the performance of advanced semiconductor devices, detecting faults, and conducting failure analysis. It also holds great importance in the advancement and quality assurance of electronics and other semiconductor technologies. Contact us to learn more.

Analyses and Applications:

  • Transistor characterization / Family of Curves, low-current measurements
  • Two-point and Four-Point Kelvin measurements
  • EBIC (Electron Beam Induced Current) – high voltage +/-50V amplifier
  • EBAC (Electron Beam Absorbed Current)
  • RCI (Resistive Contrast Imaging)
  • EBIRCH (Electron Beam Induced Resistance Change)


Failures and Examples:

  • Advanced Materials and Structures Characterization (e.g. nanowires, solid state batteries, micro LEDs)
  • Fault Localization (e.g. leakages, shorts, or opens)
  • Memory bit cells, test structures, via chain, logic net, MIM capacitors, etc.
  • PN Junction Characterization

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