In production process control, RBS can help to ensure and maintain consistency in film thickness and composition over longer periods of time. It can help with accuracy and precision for deposition processes. It can translate process parameters into concrete numbers. RBS can also help to fine tune the desired properties of a film in conjunction with process modifications. For failure analysis projects, RBS can help diagnose problems such as the amount of film being used or applied on a surface.
The hydrogen content of a film can potentially affect the properties and performance of a product. During production processes, there may be a need for a specific amount of hydrogen or none at all. RBS can help with hydrogen measurements on materials such as carbon films, low k dielectrics and other films on semiconductors, including dielectric films.
Eurofins EAG Laboratories is one of the very few worldwide to offer RBS in a commercial lab environment. With our multitude of techniques, we have the resources to use RBS as a standalone measurement or in conjunction with other tools. Our decades of experience and breadth of services allow us to work closely with our clients to tailor an analytical plan to their needs.
Contact us today to learn how we can help you on your next project.