RGA is a Residual Gas Analysis test that determines the gas mixture inside hermetically sealed devices. In order to eliminate failures in microelectronic components the internal gas composition of the component must be known. MIL-STD 883 & MIL-STD 750, Method 1018 is the accepted specification for internal gas analysis. Residual Gas Analysis (RGA) is used to quantitatively measure the primary and trace gases inside hermetic devices. This gas content, particularly moisture concentration, can cause long-term reliability problems. Samples of process atmospheres and unusual sealing environments can be analyzed to detect the evolution or resorption of gases. The system software can determine moisture content as well as an entire spectrum of gases in microelectronics, semiconductors, and medical implant.