EELS and EDS coupled with STEM provides chemical composition along with structure information of materials.
With the demand of lithium-ion batteries, it is critical to understand the structure and composition with high spatial resolution.
Two-dimensional mapping of matrix elements in electronic devices is discussed, as provided by STEM and EELS techniques from EAG Laboratories.
Improper aperture oxidation can lead to high stress or introduce unintended defects ultimately resulting in failure. Here, we present a study using STEM EELS to provide a method for measuring differences in oxygen bonding.